Daim ntawv thov ntawm siab - kub mini cov kev lag luam hepa Daim ntawv thov no yog qhov tseem ceeb los ua kom tau txais cov txiaj ntsig tau zoo thiab ua haujlwm. Nov yog cov ncauj lus kom ntxaws ntxaws piav qhia:
I. Thov Kev Thov thiab Cov Tub Ntxhais Zog
1. Daim ntawv thov khoom:
{{{0-}}} ecidation rauv: siv rau kev loj hlob ntawm silicon dioxide (SIDING} Ua haujlwm rau Silicon
{{0-} diffusion rauv taws ua kom muaj impurities (xws li boricon wafer ntawm cov cua sov los ua PN junctions los yog doping.
-}}- Cov txheej txheem kub}
2. Daim ntawv thov qhov chaw nyob: ntsia rau qhov kawg ntawm cov txheej txheem roj (feem ntau siab -}}}}}}} Cov txheej txheem saum toj no, nrog rau ntawm cov pa inlet ntawm cov khoom siv chamber. Cov huab cua huv lossis roj yuav tsum tau lim ua ntej nkag mus rau hauv lub raj quartz ntawm qhov kub siab tshaj 1000 degree.
3. Cov haujlwm tseem ceeb: muab "ultra- kev ua pa roj av thiab ib puag ncig {} Precision high {}} cov txheej txheem kub.
-} Tiv thaiv cov siv lead ua rau muaj kev phom sij hauv qab qhov kev sib tsoo thiab cov kev sib cais thiab cov khoom sib txuam ua ke hauv cov silicon crystal.
{-}} Nrhiav kom muaj lub rooj loog ntau, rau cov txheej txheem oxide, tuaj yeem ua rau lub rooj sib tw oxide,
- tswj doping unifity: hauv kev sib txawv, particle paug cov yam ntxwv thiab cuam tshuam cov hluav taws xob tsis zoo ntawm lub nti.
Ii. Vim li cas "siab {- kub" thiab "ultra {2} High Efficiency" lim hwv yog qhov tseem ceeb hauv qib no?
1. Huab Siab - kub tsis kam (feem ntau 300℃{{}}℃lossis siab dua):
- Txoj kev xav tau: Qhov ntsuas kom ntsuas rau cov txheej txheem semiconductor thiab diffusion feem ntau ntawm 900℃rau 1200 degree. Cov roj cua nkag yog cov ua ntej ua ntej nkag mus rau ntawm lub raj tawm, yog li cov lim dej yuav tsum tau tsim tawm los ntawm cov txheej txheem siab (feem ntau yog tsim los ntawm 300 degree, nrog cov npoo).
-} Cov Khoom Ruaj Khov: Tshwj xeeb he {}}}}}} kub}}}} kub}}} kub}}} kub siab, tsis li ntawd, lawv lawv tus kheej yuav dhau los ua qhov tsis huv.
2. Ultra - txoj kev ua tau zoo (feem ntau H14 lossis U15 thiab siab dua):
- Cuag qhov tseeb: Cov kev lag luam semiconduct cuam tshuam nrog cov lus uas tuaj yeem ua kev puas tsuaj nano- Cov qauv kev sib tw. Muaj feem ntau yuav ntes tau ua hauj lwm zoo rau cov lus tshaj lossis sib npaug rau 0.1μm lossis ntau dua lossis sib npaug rau 0.05μm. H14 Theem (efficiticy ntau dua los yog sib npaug ntawm 99.995% rau 0.2μm cov ntsiab lus ntau dua lossis muaj txiaj ntsig zoo dua lossis muaj txiaj ntsig zoo dua lossis sib npaug {{12}.
{{0- Cov txiaj ntsig zoo ntawm Mini Cov Qauv Tsim: Tsis muaj kev pheej hmoo ntawm kev pheej hmoo ntawm cov hlau Ion tso tawm los ntawm txhuas cov partitions hauv cov ntxaij lim dej partitioned. Sodium (na), poov tshuaj (k), hlau (FE), thiab lwm yam hlau ions yog "tus neeg tua tsiaj" hauv cov txheej txheem semiconduct, ua rau cov khoom siv sememonduct, ua rau muaj kev cuam tshuam loj heev.
{- Kev teeb tsa cov qauv: Pab tswj kev teeb tsa hauv qhov chaw ntawm cov roj av roj.
- High plua plav tuav peev muaj peev xwm: Tsim nyog rau ntev-}} tsis tau muaj cov xwm txheej ntau lawm.
III. Cov Kev Kawm Tshwj Xeeb thiab Kev Lag Luam Cov yam ntxwv
1. Tshaj cov qauv huv si:
Cov khoom lag luam semiconductor yog nqa tawm hauv chav kawm 1 (ISO 3) lossis chav tsev siab dua. Txawm li cas los xij, txoj kev nyiam huv yuav tsum muaj nyob hauv cov cuab yeej ua cov tshuaj tiv thaiv, yog ob peb qhov kev txiav txim siab siab dua li chav nyob ib puag ncig, yog "chav huv nyob hauv chav huv". Kuj tseem muaj qhov yuav tsum ua kom nruj rau cov pa hluav taws xob molborne (AMC), uas yuav tsum tau cov ntxaij lim dej (AMC) lawv tus kheej kom cov yam ntxwv tsis tshua muaj tshuaj lom neeg.
2. Qhov kawg khoom siv purity:
-}} Txhua cov ntaub ntawv ntawm cov lim: Txhua cov ntaub ntawv yuav tsum tau ntsib Ultra {{1}- Cov ntawv thov kom huv si. Tus ncej stainless hlau xav tau siab siab-}}}}} ion lossis zoo dua rau cov neeg tsis tshua muaj hlau tsis tshua muaj hlau.
- lim cov lim tawm thiab cov nplaum: Yuav tsum tau kho tshwj xeeb kom muaj cov kab mob - kub thiab {{{{} Lub tshuab nqus tsev.
3. Tseeb muab tau zoo thiab xaim kom pom:
{- Installation: Yuav siv riam - ntug kev sib khi los yog lwm txoj kev airtight
{{0-}}}}}}} Cov qauv kev ntsuas kom zoo dua li kev lag luam zoo dua li kev lag luam zoo dua li kev lag luam zoo dua li kev lag luam zoo dua, thiab qee qhov chaw so tsis tau.
IV. Cov ntsiab lus ntawm tus nqi thiab qhov tseem ceeb ntawm daim ntawv thov
1. The Lifeline of Yield: In nanometer-scale chip manufacturing, a single dust particle larger than the circuit feature size can ruin a die (grain), or even an entire wafer (wafer). High-efficiency filters are a prerequisite for ensuring ultra-high yield (>95%).
2. Lub ntsiab lus tseem ceeb rau cov thev naus laus zis: Raws li chip processes hloov zuj zus los ntawm 28nm, 5nm, thiab ntau yam yuav tsum muaj rau qhov tsis xws luag kom muaj kev cuam tshuam ntxiv. Siab - kub ultra {6} h siab} Cov lim dej siab yog qhov tsis tseem ceeb thev naus laus zis.
3. Lub cleatstone ntawm cov khoom ntseeg tau: txwv tsis pub muaj tej yam tsis xws luag, kom ntseeg tau hluav taws xob ruaj khov thiab kev ntseeg tau ntawm cov chips thaum lub sij hawm ntev.
4. Ua raws li cov txheej txheem kev lag luam: Qhov yooj yim rau cov kev xav tau rau cov khoom lag luam semiconduct los ntawm kev ua haujlwm hauv kev lag luam xws li SEMI (thoob ntiaj teb Semiconductor Kev Lag Luam Kev Lag Luam Kev Lag Luam).
Xaus: nyob rau hauv semiconductor siab {{}} kub oxidation thiab diffusion HEPA cov ntxaij lim dej tau hloov pauv lub luag haujlwm ntawm "lim"; Lawv yog cov "txheej txheem gasisticated". Lawv cov kev ua tau zoo ncaj qha seb cov microcosm ntawm cov kev ua haujlwm sib xyaw ua ke "Carved" ntawm cov kev txiav txim siab ntawm semiconder, xav txog kev txiav kev lag luam rau kev txiav tawm rau cov khoom siv yooj yim.
Cov ntawv no tau ua tib zoo saib xyuas kom paub meej tias muaj kev hais lus raug thiab kev hais qhia.
